Instrument
We would like to introduce our laboratory facilities.
Equipment reservations can be made through the booking website.(Please note that prior registration is required to use the booking website.)
Pulsed Laser Deposition
(PLD) system
This system enables the fabrication of inorganic thin films by laser ablation.
Electron Beam Evaporation System
This system enables the deposition of metal thin films by electron beam evaporation.
X-ray Diffractometer
This system enables crystal structure analysis using X-ray diffraction.
Atomic Force Microscope (AFM)
This system enables atomic-level measurement of thin film surface topography.
Cleanroom
(Shared Facility)
This facility is used for device fabrication, including photolithography.
Fume Hood
This facility is used for microfabrication of devices using chemical solutions.
Probe Station
This facility is used for measuring electronic devices and circuits.
Cryostat
This system allows measurement of electronic devices over a wide temperature range, from 10 K to 500 K.
Semiconductor Parameter
Analyzer
This 6-channel system allows a wide range of transistor measurements.
Current Waveform Analyzer
This system enables the acquisition of voltage and current waveforms at a 1 GHz sampling rate.
Potentiostat
Galvanostat
Various ion-related electrochemical measurements can be conducted using this system.
